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Influence of Impinging Ion Energy on the Bonding and Mechanical Characteristics of DLC Films Deposited by Microwave ECR Plasma CVD
Sujit Singh, Mukesh Pandey, Ramaswamy Kishore, Naresh Chand, Sitaram Dash, Ashok Tyagi, Dinkar PatilVolume:
5
Year:
2008
Language:
english
Pages:
8
DOI:
10.1002/ppap.200800011
File:
PDF, 338 KB
english, 2008