Plasma Etching and Roughening of Thin Polymeric Films: A...

Plasma Etching and Roughening of Thin Polymeric Films: A Fast, Accurate, in situ Method of Surface Roughness Measurement

George Kokkoris, Nikolaos Vourdas, Evangelos Gogolides
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Volume:
5
Year:
2008
Language:
english
Pages:
9
DOI:
10.1002/ppap.200800071
File:
PDF, 535 KB
english, 2008
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