Computer Modeling of Plasmas and Plasma-Surface Interactions
Annemie Bogaerts, Evi Bultinck, Maxie Eckert, Violeta Georgieva, Ming Mao, Erik Neyts, Laurent SchwaederléVolume:
6
Year:
2009
Language:
english
Pages:
13
DOI:
10.1002/ppap.200800207
File:
PDF, 1.22 MB
english, 2009