Deep X-ray Lithography for Direct Patterning of PECVD Films

Plasma Processes and Polymers 2010 Vol. 7; Iss. 6

Deep X-ray Lithography for Direct Patterning of PECVD Films

Stefano Costacurta, Luca Malfatti, Alessandro Patelli, Paolo Falcaro, Heinz Amenitsch, Benedetta Marmiroli, Gianluca Grenci, Massimo Piccinini, Plinio Innocenzi
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Volume:
7
Year:
2010
Language:
english
Pages:
7
DOI:
10.1002/ppap.200900147
File:
PDF, 408 KB
english, 2010
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