Nanopatterning of Plasma Polymer Thin Films by ArF...

Plasma Processes and Polymers 2010 Vol. 7; Iss. 7

Nanopatterning of Plasma Polymer Thin Films by ArF Photolithography: Impact of Polymer Structure on Patterning Properties

Ali Dirani, Fernand Wieder, Vincent Roucoules, Aissam Airoudj, Olivier Soppera
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Volume:
7
Year:
2010
Language:
english
Pages:
11
DOI:
10.1002/ppap.200900162
File:
PDF, 548 KB
english, 2010
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