Kinetics of RPECVD Organosilicon Polymer Post-treatment in a N2/O2 Microwave Plasma Remote Afterglow
Sami Abou Rich, Vianney Mille, Céline Vivien, Sylvie Godey, Philippe SupiotVolume:
7
Year:
2010
Language:
english
Pages:
10
DOI:
10.1002/ppap.200900185
File:
PDF, 1.00 MB
english, 2010