Design of a Disk Resonator Gyroscope With High Mechanical...

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Journal of Microelectromechanical Systems 2016

Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Xiao, Dingbang, Zhou, Xin, Li, Qingsong, Hou, Zhanqiang, Xi, Xiang, Wu, Yulie, Wu, Xuezhong
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Year:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2558197
File:
PDF, 5.05 MB
english, 2016
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