Development of VHF Plasma Source with Short Discharge Gap...

Plasma Processes and Polymers 2009 Vol. 6; Iss. Supplement

Development of VHF Plasma Source with Short Discharge Gap for Solar Cells

Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai
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Volume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200930610
File:
PDF, 175 KB
english, 2009
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