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Production of VHF excited H2 Plasma by New Method of Superposing the Standing Waves
Hirofumi Kaneko, Akio Kodera, Yukio Soejima, Shinji Tsuji, Masayoshi MurataVolume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200930612
File:
PDF, 440 KB
english, 2009