Deposition of Barrier Layers for Thin Film Solar Cells...

Plasma Processes and Polymers 2009 Vol. 6; Iss. Supplement

Deposition of Barrier Layers for Thin Film Solar Cells Assisted by Bipolar Substrate Biasing

Evelyn Häberle, Jochen Kopecki, Andreas Schulz, Matthias Walker, Ulrich Stroth
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Volume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200930613
File:
PDF, 480 KB
english, 2009
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