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Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence
Catalin Vitelaru, Ludovic de Poucques, Tereza Hytkova, Tiberiu M. Minea, Caroline Boisse-Laporte, Jean Bretagne, Gheorghe PopaVolume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200930801
File:
PDF, 210 KB
english, 2009