Enhanced AP-PE-CVD Process Understanding and Control by...

Plasma Processes and Polymers 2009 Vol. 6; Iss. Supplement

Enhanced AP-PE-CVD Process Understanding and Control by Application of Integrated Optical, Electrical and Modelling Diagnostics

David Sawtell, Philip A. Martin, David W. Sheel
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Volume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200931608
File:
PDF, 287 KB
english, 2009
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