SiOx-Based Multilayer Barrier Coatings Produced by a Single...

Plasma Processes and Polymers 2009 Vol. 6; Iss. Supplement

SiOx-Based Multilayer Barrier Coatings Produced by a Single PECVD Process

Alessandro Patelli, Simone Vezzù, Lorenzo Zottarel, Enrico Menin, Cinzia Sada, Alessandro Martucci, Stefano Costacurta
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Volume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200931703
File:
PDF, 306 KB
english, 2009
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