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Creating Anti-Reflective Nanostructures on Polymers by Initial Layer Deposition before Plasma Etching
Irmina Wendling, Peter Munzert, Ulrike Schulz, Norbert Kaiser, Andreas TünnermannVolume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200931810
File:
PDF, 607 KB
english, 2009