Particle-in-Cell/Monte Carlo Collisions Model for the...

Plasma Processes and Polymers 2009 Vol. 6; Iss. Supplement

Particle-in-Cell/Monte Carlo Collisions Model for the Reactive Sputter Deposition of Nitride Layers

Evi Bultinck, Stijn Mahieu, Diederik Depla, Annemie Bogaerts
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Volume:
6
Year:
2009
Language:
english
Pages:
1
DOI:
10.1002/ppap.200931904
File:
PDF, 280 KB
english, 2009
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