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Investigation of the Negative Ions in Ar/O2 Plasma of Magnetron Sputtering Discharge with Al:Zn Target by Ion Mass Spectrometry
Petr Pokorný, Martin Mišina, Jiří Bulíř, Ján Lančok, Přemysl Fitl, Jindřich Musil, Michal NovotnýVolume:
8
Year:
2011
Language:
english
Pages:
6
DOI:
10.1002/ppap.201000195
File:
PDF, 268 KB
english, 2011