GC-MS Investigation of Hexamethyldisiloxane–Oxygen Fed Cold...

Plasma Processes and Polymers 2011 Vol. 8; Iss. 10

GC-MS Investigation of Hexamethyldisiloxane–Oxygen Fed Cold Plasmas: Low Pressure Versus Atmospheric Pressure Operation

Fiorenza Fanelli, Riccardo d'Agostino, Francesco Fracassi
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Volume:
8
Year:
2011
Language:
english
Pages:
10
DOI:
10.1002/ppap.201000201
File:
PDF, 325 KB
english, 2011
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