The Role of Oxygen and Surface Reactions in the Deposition...

Plasma Processes and Polymers 2012 Vol. aop; Iss. aop

The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure

Rüdiger Reuter, Katja Rügner, Dirk Ellerweg, Teresa de los Arcos, Achim von Keudell, Jan Benedikt
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Volume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/ppap.201100146
File:
PDF, 551 KB
english, 2012
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