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Deposition of Amorphous Hydrogenated Carbon Nitride Films with a Dielectric Barrier Discharge
Ulrike Martens, H. C. Thejaswini, Abhijit Majumdar, Rainer HipplerVolume:
9
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/ppap.201100185
File:
PDF, 665 KB
english, 2012