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[IEEE 2016 32nd Thermal Measurement, Modeling & Management Symposium (SEMI-THERM) - San Jose, CA, USA (2016.3.14-2016.3.17)] 2016 32nd Thermal Measurement, Modeling & Management Symposium (SEMI-THERM) - Stable thermoreflectance thermal imaging microscopy with piezoelectric position control
Shakouri, Alexander, Ziabari, Amirkoushyar, Kendig, Dustin, Bahk, Je-Hyeong, Xuan, Yi, Ye, Peide D., Yazawa, Kazuaki, Shakouri, AliYear:
2016
Language:
english
DOI:
10.1109/semi-therm.2016.7458456
File:
PDF, 1.09 MB
english, 2016