![](/img/cover-not-exists.png)
[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - 90 MHz nanomechanical structures fabricated by stencil deposition and dry etching
Kim, G.M., ven den Boogaart, M.A.F., Kawai, S., Kawakatsu, H., Brugger, J.Volume:
1
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1215616
File:
PDF, 334 KB
english, 2003