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[IEEE 2004 International Semiconductor Conference. CAS 2004 (IEEE Cat. No.04TH8748) - Sinaia, Romania (Oct. 4-6, 2004)] 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) - 3D MEMS circuits integration for RF and millimeterwave communications
Dubuc, D., Grenier, K., Do, M.N., Busquere, J.P., Coustou, A., Ducarouge, B., Melle, S., Mazenq, L., Boatchriha, F., Pons, P., Plana, R.Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/smicnd.2004.1402820
File:
PDF, 609 KB
english, 2004