![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Creep-resistant nanocrystalline gold-vanadium alloyed microcorrugated diaphragms (MCDS)
Li, Jin, Yang, Zhengan, Psychogiou, Dimitra, Sinanis, Michael D., Peroulis, DimitriosYear:
2015
Language:
english
DOI:
10.1109/transducers.2015.7181066
File:
PDF, 1.85 MB
english, 2015