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[IEEE 2016 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Boise, ID, USA (2016.4.15-2016.4.15)] 2016 IEEE Workshop on Microelectronics and Electron Devices (WMED) - "Inside-Out" Approach for Sub-nm Resolution Carrier Profiling in Semiconductors
Hagmann, Mark J.Year:
2016
Language:
english
DOI:
10.1109/wmed.2016.7458251
File:
PDF, 691 KB
english, 2016