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Thermoelastic Dissipation in MEMS/NEMS Flexural Mode Resonators
Yan, Jize, Seshia, Ashwin A.Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c075
Date:
February, 2009
File:
PDF, 2.19 MB
english, 2009