Optimization of Tungsten Dual Poly-Metal Gates in Memory...

Optimization of Tungsten Dual Poly-Metal Gates in Memory Devices with Ti/WN/WSiN Barrier Metal

Sung, Min-Gyu, Park, Sung-Ki, Ali, Ahmed I., Kim, Yong Soo
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Volume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7622
Date:
September, 2013
File:
PDF, 1.29 MB
english, 2013
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