![](/img/cover-not-exists.png)
Optimization of Tungsten Dual Poly-Metal Gates in Memory Devices with Ti/WN/WSiN Barrier Metal
Sung, Min-Gyu, Park, Sung-Ki, Ali, Ahmed I., Kim, Yong SooVolume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7622
Date:
September, 2013
File:
PDF, 1.29 MB
english, 2013