The Impact of Tunnel Oxide Nitridation to Reliability Performance of Charge Storage Non-Volatile Memory Devices
Lee, Meng Chuan, Wong, Hin YongVolume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.9018
Date:
February, 2014
File:
PDF, 5.08 MB
english, 2014