OPTIMAL ITERATIVE LEARNING CONTROL OF WAFER TEMPERATURE...

IFAC Proceedings Volumes 2002 Vol. 35; Iss. 1

OPTIMAL ITERATIVE LEARNING CONTROL OF WAFER TEMPERATURE UNIFORMITY IN RAPID THERMAL PROCESSING

Lee, Kwang S., Ahn, Hyojin, Chin, In sik, Lee, Jay H., Yang, Dae R.
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Volume:
35
Year:
2002
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20020721-6-es-1901.00624
File:
PDF, 1.41 MB
english, 2002
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