VARIABLE FREQUENCY CONTROL FOR SPIDER-DRIVEN...

IFAC Proceedings Volumes 2005 Vol. 38; Iss. 1

VARIABLE FREQUENCY CONTROL FOR SPIDER-DRIVEN ULTRA-PRECISION STAGES

Hashimoto, Seiji, Ohishi, Kiyoshi, Kosaka, Koji, Ishikawa, Takeo, Kubota, Hiroshi, Ohmi, Tadahiro
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Volume:
38
Year:
2005
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20050703-6-cz-1902.01227
File:
PDF, 1.53 MB
english, 2005
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