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Applying Grey Relational Analysis and Fuzzy Neural Network to Improve The Yield of Thin-Film Sputtering Process in Color Filter Manufacturing
Chiang, Yu-Min, Hsieh, Hsin-HsienVolume:
42
Year:
2009
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20090603-3-ru-2001.0423
File:
PDF, 855 KB
english, 2009