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Bayesian statistical monitoring of complex semiconductor manufacturing batch processes
Ge, Zhiqiang, Zheng, Junhua, Song, Zhihuan, Dai, HuapingVolume:
44
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20110828-6-it-1002.00126
Date:
January, 2011
File:
PDF, 359 KB
english, 2011