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Multilevel Kernel Methods for Virtual Metrology in Semiconductor Manufacturing
Schirru, Andrea, Pampuri, Simone, De Luca, Cristina, De Nicolao, GiuseppeVolume:
44
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20110828-6-it-1002.01339
Date:
January, 2011
File:
PDF, 445 KB
english, 2011