Integrated Design and Control of Flexure-Based...

IFAC Proceedings Volumes 2011 / 01 Vol. 44; Iss. 1

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Shilpiekandula, Vijay, Youcef-Toumi, Kamal
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Volume:
44
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20110828-6-it-1002.03796
Date:
January, 2011
File:
PDF, 235 KB
english, 2011
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