Effect of Annealing Atmosphere on the Structural and Optical Properties of ZnO Thin Films on Si (100) Substrates Grown by Atomic Layer Deposition
Tian, J.L., Wang, Gui Gen, Zhang, Hua YuVolume:
37
Language:
english
Journal:
Journal of Nano Research
DOI:
10.4028/www.scientific.net/JNanoR.37.92
Date:
December, 2015
File:
PDF, 2.65 MB
english, 2015