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Thin Solid Films 2016 / 6

Interface characterization in B-based multilayer mirrors for next generation lithography

Naujok, Philipp, Yulin, Sergiy, Müller, Robert, Kaiser, Norbert, Tünnermann, Andreas
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.05.053
Date:
June, 2016
File:
PDF, 319 KB
english, 2016
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