Deformation of a LCD Glass-Panel by Alignment Process in Nanoimprint Lithography
Park, I., Yim, H., Jang, S., Shin, D., Lim, S., Jeong, J. I.Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c003
Date:
February, 2009
File:
PDF, 2.69 MB
english, 2009