Radio Frequency Source Power-Induced Ion Energy Impact on...

Journal of Nanoscience and Nanotechnology 2011 / 02 Vol. 11; Iss. 2

Radio Frequency Source Power-Induced Ion Energy Impact on SiN Films Deposited Using a Room Temperature SiH4–N2 Plasma

Kim, Byungwhan, Kwon, Sanghee, Woo, Hyung-Su, Kim, Jeong, Jung, Sang Chul
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Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.3405
Date:
February, 2011
File:
PDF, 2.72 MB
english, 2011
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