Nanomachining by Rubbing at Ultrasonic Frequency Under Controlled Shear Force
Muraoka, MikioVolume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.3519
Date:
March, 2011
File:
PDF, 6.30 MB
english, 2011