Nanometer Scale Assessment of Mechanical Strain Induced in Silicon by a Periodic Line Array
Escoubas, S., Gaudeau, G., Ezzaidi, Y., Thomas, O., Morin, P.Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.4292
Date:
October, 2011
File:
PDF, 6.94 MB
english, 2011