Contact Hole Shrinking of Directed Self-Assembly and Its Application Based on Simulation Approach
Kim, Sang-KonVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.11288
Date:
October, 2015
File:
PDF, 4.40 MB
english, 2015