Contact Hole Shrinking of Directed Self-Assembly and Its...

Contact Hole Shrinking of Directed Self-Assembly and Its Application Based on Simulation Approach

Kim, Sang-Kon
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Volume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.11288
Date:
October, 2015
File:
PDF, 4.40 MB
english, 2015
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