Unintentional carbide formation evidenced during high-vacuum magnetron sputtering of transition metal nitride thin films
Greczynski, G., Mráz, S., Hultman, L., Schneider, J.M.Volume:
385
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.05.129
Date:
November, 2016
File:
PDF, 834 KB
english, 2016