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Monte Carlo Simulation of Scanning Electron Microscope Image of Sidewall Shape for Linewidth Measurement
Xiao, S. M., Zhang, Z. M., Li, H. M., Ding, Z. J.Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c225
Date:
February, 2009
File:
PDF, 459 KB
english, 2009