Monte Carlo Simulation of Scanning Electron Microscope...

Monte Carlo Simulation of Scanning Electron Microscope Image of Sidewall Shape for Linewidth Measurement

Xiao, S. M., Zhang, Z. M., Li, H. M., Ding, Z. J.
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Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.c225
Date:
February, 2009
File:
PDF, 459 KB
english, 2009
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