Neural Network Modeling of Deposition Rate Characteristics...

Neural Network Modeling of Deposition Rate Characteristics of Low Temperature Silicon Nitride Deposited by Inner Two Parallel Coil Inductively Coupled Plasma Chemical Vapor Deposition

Kang, Sungchil, Jeong, Seong-Kyun, Kwon, Kwang-Ho, Park, Kang-Bak
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.8171
Date:
December, 2013
File:
PDF, 704 KB
english, 2013
Conversion to is in progress
Conversion to is failed