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Kinetic Monte Carlo (kMC) Simulation of Carbon Co-Implant on Pre-Amorphization Process
Park, Soonyeol, Cho, Bumgoo, Yang, Seungsu, Won, TaeyoungVolume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2263
Date:
May, 2010
File:
PDF, 455 KB
english, 2010