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Enhancement of the Crystalline Ge Film Growth by Inductively Coupled Plasma-Assisted Pulsed DC Sputtering
Kim, Eunkyeom, Han, Seung-HeeVolume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.9997
Date:
November, 2014
File:
PDF, 5.68 MB
english, 2014