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Investigation in the interface adhesion strength between SU-8 photoresist and metal substrate by ultrasonic treatment
Zhang, Xiaolei, Du, Liqun, Zhao, Ming, Song, ChangVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2632-2
Date:
October, 2016
File:
PDF, 873 KB
english, 2016