Evaluation of oxide chemical mechanical polishing performance of polystyrene coated ceria hybrid abrasives
Chen, Ailian, Zhang, Zefang, Li, Xiazhang, Chen, YangVolume:
27
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-4110-0
Date:
March, 2016
File:
PDF, 1.96 MB
english, 2016