Thermodynamic analysis on deposition of SiBCN ceramic by...

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Journal of the European Ceramic Society 2016 / 6

Thermodynamic analysis on deposition of SiBCN ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3BCl3NH3H2Ar system

Dong, Ning, Chai, Nan, Liu, Yongsheng, Liu, Xiaofei, Qin, Hailong, Zhang, Xiaowei Yin Litong, Cheng, Laifei
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Language:
english
Journal:
Journal of the European Ceramic Society
DOI:
10.1016/j.jeurceramsoc.2016.05.030
Date:
June, 2016
File:
PDF, 5.82 MB
english, 2016
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