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JMEMS Letters Fabrication of the Differential Microwave Power Sensor by Seesaw-Type MEMS Membrane
Yi, Zhenxiang, Yan, Hao, Yan, Jiabin, Liao, XiaopingYear:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2569610
File:
PDF, 833 KB
english, 2016