Fabrication of 70 nm-Sized Zero Residual Polymer Patterns...

Journal of Nanoscience and Nanotechnology 2009 / 07 Vol. 9; Iss. 7

Fabrication of 70 nm-Sized Zero Residual Polymer Patterns by Thermal Nanoimprint Lithography

Yang, Ki-Yeon, Kim, Jong-Woo, Byeon, Kyeong-Jae, Lee, Hee-Chul, Lee, Heon
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Volume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.m30
Date:
July, 2009
File:
PDF, 1.93 MB
english, 2009
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